Plasma Physics and Chemistry, Particle-Surface Interactions

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A. Neugebauer, “Condensation, Nucleation, and Growth of Thin Films,” in Handbook of Thin Film Technology, edited by L.I. Maissel and R. Glang, McGraw-Hill, New York 1970. J.E. Greene, “Physics of Film Growth from the Vapor Phase,” in Multicomponent and Multilayered Thin Films for Advanced


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